1️⃣ Sensor Structure
Diffused Silicon Formed by diffusing impurities into a silicon diaphragm
Uses piezoresistive strain gauges integrated on the silicon
Mature and widely adopted technology
Single-Crystal Silicon Built from a single crystal silicon wafer with micro-machined structure
Often fabricated using MEMS technology
Highly uniform crystal structure improves repeatability
2️⃣ Accuracy & Stability
Diffused Silicon
• Typical accuracy: ~0.2–0.5% FS
• Good stability for most industrial applications
Single-Crystal Silicon
• Higher accuracy potential (often ≤0.075% FS)
• Excellent long-term stability due to uniform crystal lattice
3️⃣ Temperature Performance
Diffused silicon sensors generally require stronger temperature compensation.
Single-crystal silicon sensors benefit from more predictable material behavior, making temperature compensation more effective and stable.
4️⃣ Typical Applications
Diffused Silicon
✔ General industrial pressure measurement
✔ Water systems
✔ Hydraulic systems
✔ Cost-sensitive applications
Single-Crystal Silicon
✔ High-accuracy transmitters
✔ Differential pressure measurement
✔ Process control
✔ Applications requiring long-term stability
Both technologies are excellent — the best choice depends on accuracy requirements, environmental conditions, and budget.
Diffused silicon remains the workhorse of industrial pressure measurement, while single-crystal silicon is increasingly used where higher precision and stability are required.
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